Journal ArticleDOI
Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering
TLDR
In this paper, the authors fabricated ZnO thin-film transistors by rf magnetron sputtering on Si substrates held near room temperature, and the best devices had field effect mobility of more than 2 cm2/V and an on/off ratio>106.Abstract:
We fabricated ZnO thin-film transistors by rf magnetron sputtering on Si substrates held near room temperature. The best devices had field-effect mobility of more than 2 cm2/V s and an on/off ratio>106. These ZnO films had resistivity ∼105 ohm cm, with high optical transparency (>80% for wavelength >400 nm), and compressive stress <0.5 GPa. The combination of transparency in the visible, excellent transistor characteristics, and low-temperature processing makes ZnO thin-film transistors attractive for flexible electronics on temperature sensitive substrates.read more
Citations
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Patent
Oxide semiconductor target
Chang-Jung Kim,Je-Hun Lee +1 more
TL;DR: In this paper, a method of forming an oxide semiconductor layer is proposed, which involves mounting an oxide target in a chamber, loading a substrate into the chamber, vacuuming the chamber and applying a direct current power to the target while injecting oxygen and a sputtering gas.
Book ChapterDOI
ZnO Transparent Thin-Film Transistor Device Physics
TL;DR: In this paper, the authors elucidate TTFT device physics issues related to channel mobility and output conductance, and propose an approach to solve the channel mobility problem in transparent thin-film transistors.
Journal ArticleDOI
An investigation on the role of low temperature annealing on the structural, morphological, optical, and electrical properties of DC magnetron sputtered Zn(1-x)Sn(x)O thin films
TL;DR: In this article , the effect of low-temperature air annealing on various physical properties of Zn (1-x) Sn (x) O (x = 0.14) (TZO) thin films was revealed.
Journal ArticleDOI
A concept to generate ultrashort ion pulses for pump-probe experiments in the keV energy range
A. Breuers,Matthias Herder,P. Kucharczyk,Marika Schleberger,Klaus Sokolowski-Tinten,Andreas Wucher +5 more
Dissertation
Fabrication, development and analysis of film bulk acoustic resonators on flexible polymer substrates
TL;DR: Thesis outline 1 1 1.1 Structure of Thesis 2 1.2 Scope, aims and objectives as mentioned in this paper 3 3.1 3.2 3.3 Thesis outline
References
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Book
Elements of X-ray diffraction
TL;DR: In this article, the authors present a chemical analysis of X-ray diffraction by Xray Spectrometry and phase-diagram Determination of single crystal structures and phase diagrams.
Journal ArticleDOI
Organic-inorganic hybrid materials as semiconducting channels in thin-film field-effect transistors
TL;DR: A thin-film field-effect transistor having an organic-inorganic hybrid material as the semiconducting channel was demonstrated and molecular engineering of the organic and inorganic components of the hybrids is expected to further improve device performance for low-cost thin- film transistors.