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Journal ArticleDOI

Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering

P. F. Carcia, +3 more
- 10 Feb 2003 - 
- Vol. 82, Iss: 7, pp 1117-1119
TLDR
In this paper, the authors fabricated ZnO thin-film transistors by rf magnetron sputtering on Si substrates held near room temperature, and the best devices had field effect mobility of more than 2 cm2/V and an on/off ratio>106.
Abstract
We fabricated ZnO thin-film transistors by rf magnetron sputtering on Si substrates held near room temperature. The best devices had field-effect mobility of more than 2 cm2/V s and an on/off ratio>106. These ZnO films had resistivity ∼105 ohm cm, with high optical transparency (>80% for wavelength >400 nm), and compressive stress <0.5 GPa. The combination of transparency in the visible, excellent transistor characteristics, and low-temperature processing makes ZnO thin-film transistors attractive for flexible electronics on temperature sensitive substrates.

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Citations
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Journal ArticleDOI

Origin of positive Vth shift and mobility effects in amorphous GaInZnO thin films

TL;DR: In this paper, the authors investigated the relationship between band alignments and threshold voltage shifts of GaInZnO (GIZO) thin films grown on SiO2/p++-Si by the RF sputtering method via utilizing X-ray photoelectron spectroscopy.
Book ChapterDOI

ZnO Based Transparent Electronics

TL;DR: In this paper, an overview of recent advances in processing, alloying and doping of ZnO and of the main applications that are currently emerging, including replacement of ITO as a transparent electrode and substitution for amorphous silicon as the channel in thin film transistors for display backplanes.
Posted Content

THz metamaterials and plasmonics using 2D materials & highly conductive transparent oxides

TL;DR: In this paper, the authors combined both of these approaches so to develop reconfigurable terahertz (THz) devices capable of providing amplitude modulation, phase modulation, and resonance frequency tuning.
References
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Book

Elements of X-ray diffraction

TL;DR: In this article, the authors present a chemical analysis of X-ray diffraction by Xray Spectrometry and phase-diagram Determination of single crystal structures and phase diagrams.
Journal ArticleDOI

Organic-inorganic hybrid materials as semiconducting channels in thin-film field-effect transistors

TL;DR: A thin-film field-effect transistor having an organic-inorganic hybrid material as the semiconducting channel was demonstrated and molecular engineering of the organic and inorganic components of the hybrids is expected to further improve device performance for low-cost thin- film transistors.
Book

Thermodynamics of solids

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