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Journal ArticleDOI

Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering

P. F. Carcia, +3 more
- 10 Feb 2003 - 
- Vol. 82, Iss: 7, pp 1117-1119
TLDR
In this paper, the authors fabricated ZnO thin-film transistors by rf magnetron sputtering on Si substrates held near room temperature, and the best devices had field effect mobility of more than 2 cm2/V and an on/off ratio>106.
Abstract
We fabricated ZnO thin-film transistors by rf magnetron sputtering on Si substrates held near room temperature. The best devices had field-effect mobility of more than 2 cm2/V s and an on/off ratio>106. These ZnO films had resistivity ∼105 ohm cm, with high optical transparency (>80% for wavelength >400 nm), and compressive stress <0.5 GPa. The combination of transparency in the visible, excellent transistor characteristics, and low-temperature processing makes ZnO thin-film transistors attractive for flexible electronics on temperature sensitive substrates.

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Citations
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Journal ArticleDOI

Uniform resistive switching properties of fully transparent TiO2-based memory devices

TL;DR: In this article, the authors observed uniform resistive switching properties in fully transparent indium-tin-oxide (ITO)/TiO2 film/F-doped SnO2 (FTO) devices where the TiO2 films were fabricated by chemical solution deposition method.
Journal ArticleDOI

Effects of vacuum annealing on the optical and electrical properties of p-type copper-oxide thin-film transistors

TL;DR: In this paper, the effects of vacuum annealing on the optical and electrical properties of the p-type copper-oxide thin-film transistors (TFTs) were investigated using the RF magnetron sputter at various temperatures.
Journal ArticleDOI

Pinecone-shaped ZnO nanostructures: Growth, optical and gas sensor properties.

TL;DR: In this paper, pinecone-shaped ZnO nanostructures have been fabricated on Si substrate by pulsed laser deposition and the scanning electron microscope images showed that pinecone shape was 6-fold symmetry and has the rough surface on one end.
Journal ArticleDOI

A 128×96 Pixel Stack-Type Color Image Sensor: Stack of Individual Blue-, Green-, and Red-Sensitive Organic Photoconductive Films Integrated with a ZnO Thin Film Transistor Readout Circuit

TL;DR: In this article, a color image was produced by a vertically stacked image sensor with blue (B), green (G), and red (R)-sensitive organic photoconductive films, each having a thin-film transistor (TFT) array that uses a zinc oxide (ZnO) channel to read out the signal generated in each organic film.
Patent

Light-emitting device using oxide semiconductor thin-film transistor and image display apparatus using the same

TL;DR: In this article, a light-emitting device with three primary colors of blue, green, and red light was presented, including a pixel region provided on a substrate and including a blue pixel region, a green pixel region and a red pixel region.
References
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Book

Elements of X-ray diffraction

TL;DR: In this article, the authors present a chemical analysis of X-ray diffraction by Xray Spectrometry and phase-diagram Determination of single crystal structures and phase diagrams.
Journal ArticleDOI

Organic-inorganic hybrid materials as semiconducting channels in thin-film field-effect transistors

TL;DR: A thin-film field-effect transistor having an organic-inorganic hybrid material as the semiconducting channel was demonstrated and molecular engineering of the organic and inorganic components of the hybrids is expected to further improve device performance for low-cost thin- film transistors.
Book

Thermodynamics of solids

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