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Journal ArticleDOI

Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering

P. F. Carcia, +3 more
- 10 Feb 2003 - 
- Vol. 82, Iss: 7, pp 1117-1119
TLDR
In this paper, the authors fabricated ZnO thin-film transistors by rf magnetron sputtering on Si substrates held near room temperature, and the best devices had field effect mobility of more than 2 cm2/V and an on/off ratio>106.
Abstract
We fabricated ZnO thin-film transistors by rf magnetron sputtering on Si substrates held near room temperature. The best devices had field-effect mobility of more than 2 cm2/V s and an on/off ratio>106. These ZnO films had resistivity ∼105 ohm cm, with high optical transparency (>80% for wavelength >400 nm), and compressive stress <0.5 GPa. The combination of transparency in the visible, excellent transistor characteristics, and low-temperature processing makes ZnO thin-film transistors attractive for flexible electronics on temperature sensitive substrates.

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Citations
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Journal ArticleDOI

Electrical response in atomic layer deposited Al:ZnO with varying stack thickness

TL;DR: In this paper, the effects of stacking of the macrocycles in atomic layer deposited (ALD) Al:ZnO thin films on the structural and electrical properties are reported. But the authors do not consider the effect of stacking on the electrical properties.
Book ChapterDOI

8 Nano-Antimicrobials Based on Metals

TL;DR: To this end, nanotechnology has been exploited to create engineered nanostructures /nanocomposites (NSs) based on well-known antimicrobial materials, generally classified as nano-antimicrobials with improved bioactive performances and controlled toxicity to human beings.
Journal ArticleDOI

Photocurrent and Persistent Photoconductivity in Zinc Oxide Thin-Film Transistors under Ultraviolet-Light Irradiation

TL;DR: In this article, the photocurrent and photoconductive decay of the bottom-gate zinc oxide thin-film transistors (ZnO TFTs) under ultraviolet (UV) light irradiation were investigated.
Journal ArticleDOI

Improving the performance of inorganic-organic hybrid photovoltaic devices by uniform ordering of ZnO nanorods and near-atmospheric pressure nitrogen plasma treatment

TL;DR: In this paper, the performance of hybrid photovoltaic devices composed of ZnO and poly(3-hexylthiophene) (P3HT) was investigated.
Journal ArticleDOI

Off-axis sputter deposition of ZnO films on c-sapphire substrates by utilizing nitrogen-mediated crystallization method

TL;DR: In this article, an off-axis sputtering configuration together with buffer layers prepared via nitrogen-mediated crystallization (NMC) is used to obtain high-quality epitaxial ZnO films on c-plane sapphire substrates.
References
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Book

Elements of X-ray diffraction

TL;DR: In this article, the authors present a chemical analysis of X-ray diffraction by Xray Spectrometry and phase-diagram Determination of single crystal structures and phase diagrams.
Journal ArticleDOI

Organic-inorganic hybrid materials as semiconducting channels in thin-film field-effect transistors

TL;DR: A thin-film field-effect transistor having an organic-inorganic hybrid material as the semiconducting channel was demonstrated and molecular engineering of the organic and inorganic components of the hybrids is expected to further improve device performance for low-cost thin- film transistors.
Book

Thermodynamics of solids

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