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Journal ArticleDOI

Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering

P. F. Carcia, +3 more
- 10 Feb 2003 - 
- Vol. 82, Iss: 7, pp 1117-1119
TLDR
In this paper, the authors fabricated ZnO thin-film transistors by rf magnetron sputtering on Si substrates held near room temperature, and the best devices had field effect mobility of more than 2 cm2/V and an on/off ratio>106.
Abstract
We fabricated ZnO thin-film transistors by rf magnetron sputtering on Si substrates held near room temperature. The best devices had field-effect mobility of more than 2 cm2/V s and an on/off ratio>106. These ZnO films had resistivity ∼105 ohm cm, with high optical transparency (>80% for wavelength >400 nm), and compressive stress <0.5 GPa. The combination of transparency in the visible, excellent transistor characteristics, and low-temperature processing makes ZnO thin-film transistors attractive for flexible electronics on temperature sensitive substrates.

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Citations
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Journal ArticleDOI

Enhancing the thermoelectric performance of ZnO epitaxial films by Ga doping and thermal tuning

TL;DR: In this paper, highly c-axis orientated Ga-doped thin films have been epitaxially deposited at different temperatures, and the surface morphology and roughness have been modified.
Journal ArticleDOI

Room temperature vacuum-induced ligand removal and patterning of ZnO nanoparticles: from semiconducting films towards printed electronics

TL;DR: In this paper, a spin coating of stable nanoparticle dispersions with low boiling point ligands is used to remove them by a vacuum-induced "sintering" process of the particles at room temperature.
Journal ArticleDOI

Monitoring the characteristic properties of Ga-doped ZnO by Raman spectroscopy and atomic scale calculations

TL;DR: In this paper, the structural and vibrational properties of zinc oxide (ZnO) are modified upon Gallium (Ga) doping by using X-ray diffraction (XRD) and Raman scattering measurements.
Journal ArticleDOI

Effect of thermal annealing on the optical and electronic properties of ZnO thin films grown on p-Si substrates

TL;DR: In this article, the effects of annealing on the optical and the electronics properties of ZnO thin films grown on p-Si(1-0-0) substrates by using radio frequency magnetron sputtering were investigated by X-ray diffraction (XRD), transmission electron microscopy (TEM), photoluminescence (PL), and XPS measurements.
References
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Book

Elements of X-ray diffraction

TL;DR: In this article, the authors present a chemical analysis of X-ray diffraction by Xray Spectrometry and phase-diagram Determination of single crystal structures and phase diagrams.
Journal ArticleDOI

Organic-inorganic hybrid materials as semiconducting channels in thin-film field-effect transistors

TL;DR: A thin-film field-effect transistor having an organic-inorganic hybrid material as the semiconducting channel was demonstrated and molecular engineering of the organic and inorganic components of the hybrids is expected to further improve device performance for low-cost thin- film transistors.
Book

Thermodynamics of solids

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