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Journal ArticleDOI

Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering

P. F. Carcia, +3 more
- 10 Feb 2003 - 
- Vol. 82, Iss: 7, pp 1117-1119
TLDR
In this paper, the authors fabricated ZnO thin-film transistors by rf magnetron sputtering on Si substrates held near room temperature, and the best devices had field effect mobility of more than 2 cm2/V and an on/off ratio>106.
Abstract
We fabricated ZnO thin-film transistors by rf magnetron sputtering on Si substrates held near room temperature. The best devices had field-effect mobility of more than 2 cm2/V s and an on/off ratio>106. These ZnO films had resistivity ∼105 ohm cm, with high optical transparency (>80% for wavelength >400 nm), and compressive stress <0.5 GPa. The combination of transparency in the visible, excellent transistor characteristics, and low-temperature processing makes ZnO thin-film transistors attractive for flexible electronics on temperature sensitive substrates.

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Citations
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Journal ArticleDOI

Photosensitivity n-channel ZnO phototransistor for optoelectronic applications: Modeling of ZnO TFT

TL;DR: The zinc oxide thin film transistor can be used in visible photo-detecting device applications and a significant increase in the drain current of ZnO TFT is observed with a maximum photosensitivity of 100 under visible light illumination.
Journal ArticleDOI

Synthesis, Optical Properties, and Ethanol-Sensing Properties of Bicone-like ZnO Microcrystals via a Simple Solution Method

TL;DR: In this paper, a large-scale uniform bicone-like ZnO microcrystals were successfully synthesized via a simple solution method at lower temperature (80 °C).
Journal ArticleDOI

Direct synthesis and characterization of optically transparent conformal zinc oxide nanocrystalline thin films by rapid thermal plasma CVD

TL;DR: X-ray diffraction indicates the grains of as-deposited ZnO to be highly textured, with the fastest growth occurring along the c-axis, and higher annealing temperatures appear to restructure the ZnNO nanocrystalline films to form nanorods of ZNO due to a combination of grain boundary diffusion and bulk diffusion.
Journal ArticleDOI

Improvement of Mobility in Oxide-Based Thin Film Transistors: A Brief Review

TL;DR: In this paper, an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/3.0) which permits unrestricted noncommercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
Journal ArticleDOI

Quantitative Calculation of Oxygen Incorporation in Sputtered IGZO Films and the Impact on Transistor Properties

TL;DR: In this article, the molecular flux of sputtered indium gallium zinc oxide (IGZO) and oxygen during IGZO growth is used to generalize the optimum synthesis conditions for thin film transistors (TFTs).
References
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Book

Elements of X-ray diffraction

TL;DR: In this article, the authors present a chemical analysis of X-ray diffraction by Xray Spectrometry and phase-diagram Determination of single crystal structures and phase diagrams.
Journal ArticleDOI

Organic-inorganic hybrid materials as semiconducting channels in thin-film field-effect transistors

TL;DR: A thin-film field-effect transistor having an organic-inorganic hybrid material as the semiconducting channel was demonstrated and molecular engineering of the organic and inorganic components of the hybrids is expected to further improve device performance for low-cost thin- film transistors.
Book

Thermodynamics of solids

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