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Proceedings ArticleDOI

Ultra-Narrow Silicon Nanowire Gate-All-Around CMOS Devices: Impact of Diameter, Channel-Orientation and Low Temperature on Device Performance

TLDR
Fully CMOS compatible silicon-nanowire (SiNW) gate-all-around (GAA) n- and p-MOS transistors are fabricated with nanowire channel in different crystal orientations and characterized at various temperatures down to 5K as mentioned in this paper.
Abstract
Fully CMOS compatible silicon-nanowire (SiNW) gate-all-around (GAA) n- and p-MOS transistors are fabricated with nanowire channel in different crystal orientations and characterized at various temperatures down to 5K. SiNW width is controlled in 1 nm steps and varied from 3 to 6 nm. Devices show high drive current (2.4 mA/mum for n-FET, 1.3 mA/mum for p-FET), excellent gate control, and reduced sensitivity to temperature. Strong evidences of carrier confinement are noticed in term of Id-Vg oscillations and shift in threshold voltage with SiNW diameter. Orientation impact has been investigated as well

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Citations
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Dissertation

Intégration de transistor mono-électronique et transistor à atome unique sur CMOS

TL;DR: In this article, the authors propose a solution for the scaling of MOSFET by reducing the dimensions of the longueur de canal of the transistors in order to reduce the number of transistors required.

Structure Effects inthegate-all-around Silicon Nanowire MOSFETs

TL;DR: In this paper, the authors theoretically examined the structure of nanowires and showed that the triangular nanowire MOSFETs capacitance was the best among all the different types of silicon-based transistors.
Proceedings ArticleDOI

Hot carrier degradation in nanowire (NW) FinFETs

TL;DR: In this paper, a quasi-two dimensional (quasi-2D) physics-based screening Coulomb scattering mobility model has been developed and implemented in Synopsys Sentaurus Device simulator.
Proceedings ArticleDOI

Simulation of correlated line-edge roughness in multi-gate devices

TL;DR: In this paper, the impacts of correlated line-edge roughness (LER) on the performance of Si channel fabrication were investigated. And the results showed that the device Vth distribution is strongly dependent on the cross-correlation, and can exhibit non-Gaussian distribution.
Journal ArticleDOI

Characterization of Fully Silicided Source/Drain SOI UTBB nMOSFETs at Cryogenic Temperatures

TL;DR: In this paper , the impact of the back-gate (V back ) on the device performance is systematically investigated, and the results demonstrate that V back is essential to tune the threshold voltage V th.
References
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Journal ArticleDOI

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TL;DR: In this article, a review highlights the recent advances in the field, using work from this laboratory for illustration, and the understanding of general nanocrystal growth mechanisms serves as the foundation for the rational synthetic control of one-dimensional nanoscale building blocks, novel properties characterization and device fabrication based on nanowire building blocks.
Journal ArticleDOI

High-performance fully depleted silicon nanowire (diameter /spl les/ 5 nm) gate-all-around CMOS devices

TL;DR: In this article, gate-all-around (GAA) n-and p-FETs on a silicon-on-insulator with 5-nm-diameter laterally formed Si nanowire channel were demonstrated.
Journal ArticleDOI

Scaling theory for cylindrical, fully-depleted, surrounding-gate MOSFET's

TL;DR: In this paper, a scaling theory for fully-depleted, cylindrical MOSFET's was presented. But the scaling theory was derived from the cylinrical form of Poisson's equation by assuming a parabolic potential in the radial direction.
Journal ArticleDOI

Multiple-gate SOI MOSFETs: device design guidelines

TL;DR: In this paper, the authors describe computer simulations of various SOI MOSFETs with double and triple-gate structures, as well as gate-all-around devices.
Journal ArticleDOI

Integrated nanoscale electronics and optoelectronics: Exploring nanoscale science and technology through semiconductor nanowires*

TL;DR: In this paper, a general approach for the synthesis of a broad range of semiconductor nanowires (NWs) with precisely controlled chemical composition, physical dimension, and electronic, optical properties using a metal cluster-catalyzed vapor-liquid-solid growth mechanism was introduced.
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