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Proceedings ArticleDOI

Ultra-Narrow Silicon Nanowire Gate-All-Around CMOS Devices: Impact of Diameter, Channel-Orientation and Low Temperature on Device Performance

TLDR
Fully CMOS compatible silicon-nanowire (SiNW) gate-all-around (GAA) n- and p-MOS transistors are fabricated with nanowire channel in different crystal orientations and characterized at various temperatures down to 5K as mentioned in this paper.
Abstract
Fully CMOS compatible silicon-nanowire (SiNW) gate-all-around (GAA) n- and p-MOS transistors are fabricated with nanowire channel in different crystal orientations and characterized at various temperatures down to 5K. SiNW width is controlled in 1 nm steps and varied from 3 to 6 nm. Devices show high drive current (2.4 mA/mum for n-FET, 1.3 mA/mum for p-FET), excellent gate control, and reduced sensitivity to temperature. Strong evidences of carrier confinement are noticed in term of Id-Vg oscillations and shift in threshold voltage with SiNW diameter. Orientation impact has been investigated as well

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Citations
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Journal ArticleDOI

Characteristics of Gate-All-Around Junctionless Poly-Si TFTs With an Ultrathin Channel

TL;DR: In this paper, the junctionless gate-all-around (GAA) poly-Si thin-film transistors (TFTs) with ultrathin channels (2 nm) were demonstrated for the first time.
Journal ArticleDOI

Ge-Rich (70%) SiGe Nanowire MOSFET Fabricated Using Pattern-Dependent Ge-Condensation Technique

TL;DR: In this article, a top-down approach of forming SiGe-nanowire (SGNW) MOSFET, with Ge concentration modulated along the source/drain (Si0.7Ge0.3) to channel (Si 0.3Ge 0.7) regions, is presented.
Journal ArticleDOI

Design space for low sensitivity to size variations in [110] PMOS nanowire devices: the implications of anisotropy in the quantization mass.

TL;DR: The considerations of the full band model here show that ON-current doubling can be observed in the ON-state at the onset of volume inversion to surface inversion transport caused by structural side size variations.
Journal ArticleDOI

High-Performance Silicon Nanowire Gate-All-Around nMOSFETs Fabricated on Bulk Substrate Using CMOS-Compatible Process

TL;DR: In this article, a self-aligned CMOS compatible method for the fabrication of gate-all-around silicon nanowire MOSFETs (GAA SNWFETs) on bulk substrate has been proposed.
Journal ArticleDOI

Impact of Gate Electrodes on $\hbox{1}/f$ Noise of Gate-All-Around Silicon Nanowire Transistors

TL;DR: In this article, the low-frequency (1/f) noise of gate-all-around silicon transistors (SNWTs) with different gate electrodes (poly-Si gate, doped fully silicided (FUSI) gate, and undoped FUSI gate) is studied in the strong-inversion linear region.
References
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Journal ArticleDOI

Semiconductor nanowires and nanotubes

TL;DR: In this article, a review highlights the recent advances in the field, using work from this laboratory for illustration, and the understanding of general nanocrystal growth mechanisms serves as the foundation for the rational synthetic control of one-dimensional nanoscale building blocks, novel properties characterization and device fabrication based on nanowire building blocks.
Journal ArticleDOI

High-performance fully depleted silicon nanowire (diameter /spl les/ 5 nm) gate-all-around CMOS devices

TL;DR: In this article, gate-all-around (GAA) n-and p-FETs on a silicon-on-insulator with 5-nm-diameter laterally formed Si nanowire channel were demonstrated.
Journal ArticleDOI

Scaling theory for cylindrical, fully-depleted, surrounding-gate MOSFET's

TL;DR: In this paper, a scaling theory for fully-depleted, cylindrical MOSFET's was presented. But the scaling theory was derived from the cylinrical form of Poisson's equation by assuming a parabolic potential in the radial direction.
Journal ArticleDOI

Multiple-gate SOI MOSFETs: device design guidelines

TL;DR: In this paper, the authors describe computer simulations of various SOI MOSFETs with double and triple-gate structures, as well as gate-all-around devices.
Journal ArticleDOI

Integrated nanoscale electronics and optoelectronics: Exploring nanoscale science and technology through semiconductor nanowires*

TL;DR: In this paper, a general approach for the synthesis of a broad range of semiconductor nanowires (NWs) with precisely controlled chemical composition, physical dimension, and electronic, optical properties using a metal cluster-catalyzed vapor-liquid-solid growth mechanism was introduced.
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