Journal ArticleDOI
High-performance fully depleted silicon nanowire (diameter /spl les/ 5 nm) gate-all-around CMOS devices
Navab Singh,Ajay Agarwal,Lakshmi Kanta Bera,Tsung-Yang Liow,R. Yang,S.C. Rustagi,C.H. Tung,Rakesh Kumar,G. Q. Lo,N. Balasubramanian,Dim-Lee Kwong +10 more
TLDR
In this article, gate-all-around (GAA) n-and p-FETs on a silicon-on-insulator with 5-nm-diameter laterally formed Si nanowire channel were demonstrated.Abstract:
This paper demonstrates gate-all-around (GAA) n- and p-FETs on a silicon-on-insulator with /spl les/ 5-nm-diameter laterally formed Si nanowire channel. Alternating phase shift mask lithography and self-limiting oxidation techniques were utilized to form 140- to 1000-nm-long nanowires, followed by FET fabrication. The devices exhibit excellent electrostatic control, e.g., near ideal subthreshold slope (/spl sim/ 63 mV/dec), low drain-induced barrier lowering (/spl sim/ 10 mV/V), and with I/sub ON//I/sub OFF/ ratio of /spl sim/10/sup 6/. High drive currents of /spl sim/ 1.5 and /spl sim/1.0 mA//spl mu/m were achieved for 180-nm-long nand p-FETs, respectively. It is verified that the threshold voltage of GAA FETs is independent of substrate bias due to the complete electrostatic shielding of the channel body.read more
Citations
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Journal ArticleDOI
Simulation of Silicon Nanowire Transistors Using Boltzmann Transport Equation Under Relaxation Time Approximation
TL;DR: In this article, an efficient approach for the simulation of electronic transport in nanoscale transistors is presented based on the multi-subband Boltzmann transport equation under the relaxation time approximation, which takes into account the effects of quantum confinement and quasi-ballistic transport.
Journal ArticleDOI
Orientational dependence of charge transport in disordered silicon nanowires.
TL;DR: Using an atomistic tight-binding model, key transport features such as mean-free paths, charge mobilities, and conductance scaling are investigated with the complementary Kubo-Greenwood and Landauer-Büttiker approaches.
Journal ArticleDOI
Gate-All-Around Junctionless Nanowire MOSFET With Improved Low-Frequency Noise Behavior
TL;DR: In this article, an n-type gate-all-around (GAA) junctionless nanowire field effect transistor (JL-NWFET) along with low-frequency noise (LFN) with respect to channel doping and the gate bias voltage was presented.
Journal ArticleDOI
Undoped-Body Extremely Thin SOI MOSFETs With Back Gates
TL;DR: In this paper, a detailed study of gate length scalability and device performance of undoped-body extremely thin silicon-on-insulator (ETSOI) MOSFETs with back gates is presented.
Journal ArticleDOI
Polarity-Controllable Silicon Nanowire Transistors With Dual Threshold Voltages
Jian Zhang,Michele De Marchi,Davide Sacchetto,Pierre-Emmanuel Gaillardon,Yusuf Leblebici,Giovanni De Micheli +5 more
TL;DR: In this paper, a gate-all-around (GAA) silicon nanowire transistor with three independent GAA electrodes is proposed, demonstrating a dynamic configurability in terms of both polarity and threshold voltage.
References
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High Performance Silicon Nanowire Field Effect Transistors
TL;DR: In this article, the influence of source-drain contact thermal annealing and surface passivation on key transistor properties was examined, and it was shown that thermal annaling and passivation of oxide defects using chemical modification can increase the average transconductance from 45 to 800 nS and average mobility from 30 to 560 cm 2 /V
Journal ArticleDOI
FinFET-a self-aligned double-gate MOSFET scalable to 20 nm
Digh Hisamoto,Wen-Chin Lee,J. Kedzierski,Hideki Takeuchi,K. Asano,C. Kuo,Erik H. Anderson,Tsu-Jae King,Jeffrey Bokor,Chenming Hu +9 more
TL;DR: In this paper, a self-aligned double-gate MOSFET, FinFET was proposed by using boron-doped Si/sub 04/Ge/sub 06/ as a gate material.
Journal ArticleDOI
High-performance thin-film transistors using semiconductor nanowires and nanoribbons
Xiangfeng Duan,Chunming Niu,Vijendra Sahi,Jian Chen,J. Wallace Parce,Stephen Empedocles,Jay L. Goldman +6 more
TL;DR: It is shown that high-performance TFTs can be produced on various substrates, including plastics, using a low-temperature assembly process and the approach is general to a broad range of materials including high-mobility materials (such as InAs or InP).
Journal ArticleDOI
Double-gate silicon-on-insulator transistor with volume inversion: A new device with greatly enhanced performance
TL;DR: The double-gate control of silicon-on-insulator (SOI) transistors is used to force the whole silicon film (interface layers and volume) in strong inversion as discussed by the authors.
Journal ArticleDOI
Benchmarking nanotechnology for high-performance and low-power logic transistor applications
R. Chau,Suman Datta,Mark Beaverton Doczy,B. Doyle,B. Jin,Jack Portland Kavalieros,Amlan Majumdar,Matthew V. Metz,Marko Radosavljevic +8 more
TL;DR: The results of this benchmarking exercise indicate that while these novel nanoelectronic devices show promise and opportunities for future logic applications, there still remain shortcomings in the device characteristics and electrostatics that need to be overcome.