S
Stephen J. Pearton
Researcher at University of Florida
Publications - 1988
Citations - 62995
Stephen J. Pearton is an academic researcher from University of Florida. The author has contributed to research in topics: Dry etching & Etching (microfabrication). The author has an hindex of 104, co-authored 1913 publications receiving 58669 citations. Previous affiliations of Stephen J. Pearton include Kyungpook National University & University of Southern California.
Papers
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Journal ArticleDOI
Fermi level dependence of hydrogen diffusivity in GaN
Alexander Y. Polyakov,N. B. Smirnov,Stephen J. Pearton,Fan Ren,B. Theys,François Jomard,Z. Teukam,Vladimir Dmitriev,Andrey E. Nikolaev,Alexander Usikov,Irina P. Nikitina +10 more
TL;DR: In this paper, it was shown that higher diffusion temperature of 500°C and longer times (50 h) are necessary to incorporate hydrogen to appreciable depth in GaN samples with different Fermi level positions.
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Investigation of the effect of temperature during off-state degradation of AlGaN/GaN High Electron Mobility Transistors
Erica A. Douglas,Chih-Yang Chang,Brent P. Gila,M. R. Holzworth,Kevin S. Jones,Li Liu,Jinhyung Kim,Soohwan Jang,Glen D. Via,Fan Ren,Stephen J. Pearton +10 more
TL;DR: AlGaN/GaN High Electron Mobility Transistors were found to exhibit a negative temperature dependence of the critical voltage for irreversible device degradation to occur during bias-stressing, indicating a breakdown in the oxide interfacial layer due to high reverse gate bias.
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Material‐dependent amorphization and epitaxial crystallization in ion‐implanted AlAs/GaAs layer structures
A. G. Cullis,N. G. Chew,C. R. Whitehouse,Dale Conrad Jacobson,J. M. Poate,Stephen J. Pearton +5 more
TL;DR: In this paper, it was shown that very different damage structures are produced in the two materials when AlAs/GaAs layer samples are subjected to Ar+ ion bombardment at liquid-nitrogen temperature.
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Redistribution of Zn in GaAs-AlGaAs heterojunction bipolar transistor structures
TL;DR: In this article, the redistribution of Zn in the base region of GaAs-AlGaAs heterojunction bipolar transistor structures during growth by organometallic vapor phase epitaxy has been examined with respect to the presence of Si doping in the emitter contact, emitter, and collector/subcollector layers, and as a function of the Zn doping concentration and Si counterdoping level in the p+ base.
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Dry patterning of InGaN and InAlN
TL;DR: In this paper, dry etch rates of InxGaAlN and InxAl1−xN alloys were found to increase with In mole fraction in CH4/H2 microwave discharges, and to decrease under the same conditions in Cl2/H 2 mixtures, indicating that either atomic hydrogen or fluorine is capable of effective removal of N from the III-V nitride materials.