S
Stephen J. Pearton
Researcher at University of Florida
Publications - 1988
Citations - 62995
Stephen J. Pearton is an academic researcher from University of Florida. The author has contributed to research in topics: Dry etching & Etching (microfabrication). The author has an hindex of 104, co-authored 1913 publications receiving 58669 citations. Previous affiliations of Stephen J. Pearton include Kyungpook National University & University of Southern California.
Papers
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Journal ArticleDOI
Selective inductively coupled plasma etching of group-III nitrides in Cl2- and BCl3-based plasmas
Randy J. Shul,C. G. Willison,M. M. Bridges,J. Han,J. W. Lee,Stephen J. Pearton,C. R. Abernathy,J. D. MacKenzie,S. M. Donovan,L. Zhang,Luke F. Lester +10 more
TL;DR: In this paper, the authors report ICP etch rates and selectivities for GaN, AlN, and InN in Cl2/Ar, Cl 2/N2, Cl N 2, Cl N 3, Cl 2 H 2, InN 2, and Cl 2 N 6, and BCl 3/SF6.
Journal ArticleDOI
Fast neutron irradiation effects in n-GaN
Alexander Y. Polyakov,N. B. Smirnov,A. V. Govorkov,A. V. Markov,Stephen J. Pearton,N. G. Kolin,D. I. Merkurisov,V. M. Boiko,Cheul Ro Lee,In Hwan Lee +9 more
TL;DR: In this article, the electrical properties and deep level spectra in undoped n-GaN films irradiated by fast neutrons are reported, and the dominant deep states introduced by neutron damage were electron traps with activation energy of 0.75eV, close to the energy of the Fermi level pinning in heavily irradiated material.
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Room temperature magnetism in GaMnP produced by both ion implantation and molecular-beam epitaxy
M. E. Overberg,Brent P. Gila,G. T. Thaler,C. R. Abernathy,Stephen J. Pearton,Nikoleta Theodoropoulou,K. T. McCarthy,S. B. Arnason,Arthur F. Hebard,S. N. G. Chu,Robert G. Wilson,J. M. Zavada,Yun Daniel Park +12 more
TL;DR: The magnetization of the dilute magnetic alloy GaMnP:C prepared by the implantation of Mn into p-GaP: C or by direct molecular-beam epitaxy is reported in this paper.
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Effect of high-density plasma etching on the optical properties and surface stoichiometry of ZnO
Kelly P. Ip,Kwang Hyeon Baik,M. E. Overberg,Eric Lambers,Young-Woo Heo,David P. Norton,Stephen J. Pearton,Fan Ren,J. M. Zavada +8 more
TL;DR: In this paper, single-crystal ZnO was etched in Cl2/Ar and CH4/H 2/Ar inductively coupled plasmas as a function of ion impact energy.
Journal ArticleDOI
Patterning of Cu, Co, Fe, and Ag for magnetic nanostructures
K. B. Jung,J. W. Lee,Y. D. Park,J. A. Caballero,Jeffrey R. Childress,Stephen J. Pearton,Fan Ren +6 more
TL;DR: In this article, the etch selectivities of thin metallic multilayer structures are investigated for the development of sensitive magnetic field sensors and memory devices based on spin-valve giant magnetoresistance elements.