S
Stephen J. Pearton
Researcher at University of Florida
Publications - 1988
Citations - 62995
Stephen J. Pearton is an academic researcher from University of Florida. The author has contributed to research in topics: Dry etching & Etching (microfabrication). The author has an hindex of 104, co-authored 1913 publications receiving 58669 citations. Previous affiliations of Stephen J. Pearton include Kyungpook National University & University of Southern California.
Papers
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Book ChapterDOI
Hydrogen in wide bandgap semiconductors
Stephen J. Pearton,Jewor W. Lee +1 more
TL;DR: In this article, the prevalence of hydrogen in the growth and processing ambients for wide bandgap semiconductors and the effect of this hydrogen on the performance of wide band gap semiconductor is discussed.
Journal ArticleDOI
Ohmic contact properties of non-polar a-plane GaN films on r-plane sapphire substrates
Kwang Hyeon Baik,Yong Gon Seo,Jaebum Kim,Sung-Min Hwang,Wantae Lim,Chih-Yang Chang,Stephen J. Pearton,Fan Ren,Soohwan Jang +8 more
TL;DR: In this article, the properties of Ti/Al/Ni/Au Ohmic contacts on n-type a-plane GaN epitaxial layers directly grown on r-plane sapphire substrates are reported.
Journal ArticleDOI
ITO∕Ti∕Au Ohmic contacts on n-type ZnO
TL;DR: The specific contact resistivity and chemical intermixing of indium-tinoxide (ITO)∕Ti∕Au Ohmic contacts on n-type bulk ZnO substrates are reported as a function of annealing temperature up to 450°C.
Patent
High electron mobility transistors with improved heat dissipation
TL;DR: In this paper, AlGaN/GaN based high electron mobility transistors (HEMTs) with improved heat dissipation are described, where a substrate has a top surface and a bottom surface, a nucleation layer on the top surface of the substrate, a transition layer on nucleation, a buffer layer on transition layer, a barrier layer on buffer layer, and a metal layer filling a via hole that extends from the bottom surface of a substrate to a bottom surfaces of the transition layer.
Journal ArticleDOI
Laser ablation of via holes in GaN and AlGaN∕GaN high electron mobility transistor structures
Travis J. Anderson,Fan Ren,Stephen J. Pearton,Michael A. Mastro,Ron T. Holm,R. L. Henry,Charles R. Eddy,Joon Yeob Lee,Kwan Young Lee,Jihyun Kim +9 more
TL;DR: In this paper, laser drilling for through-via holes was performed with a Nd:YVO4 laser for an AlGaN∕GaN high electron mobility transistor (HEMT) structure on a SiC substrate.