scispace - formally typeset
C

Chenming Hu

Researcher at University of California, Berkeley

Publications -  1300
Citations -  60963

Chenming Hu is an academic researcher from University of California, Berkeley. The author has contributed to research in topics: MOSFET & Gate oxide. The author has an hindex of 119, co-authored 1296 publications receiving 57264 citations. Previous affiliations of Chenming Hu include Motorola & National Chiao Tung University.

Papers
More filters
Journal ArticleDOI

Effects of substrate resistance on CMOS latchup holding voltages

TL;DR: It is shown that there may exist a certain optimum epitaxial layer thickness that leads to a maximum latchup holding voltage and that even a shallow trench is remarkably effective in raising the holding voltage.
Journal ArticleDOI

Current‐field characteristics of oxides grown from polycrystalline silicon

TL;DR: In this paper, a new technique determined the J•E characteristics of silicon dioxide grown from polycrystalline silicon with greatly improved sensitivity and the current density was measured over a 10−decade range without the problem of current drift or uncertainty about the field at the cathode surface due to charge trapping in the oxide.
Proceedings ArticleDOI

Sub-5 nm multiple-thickness gate oxide technology using oxygen implantation

TL;DR: In this paper, a simple method of growing oxides of multiple thicknesses using oxygen implant in sub-5 nm gate oxide technologies is presented, which can be achieved with good interface and bulk properties of the oxide.
Proceedings ArticleDOI

Spacer FinFET: nano-scale CMOS technology for the terabit era

TL;DR: In this paper, a spacer lithography process using a sacrificial layer and a CVD (Chemical Vapor Deposition) spacer layer has been developed, and is demonstrated to achieve sub-40 nm structures with conventional dry etching.
Patent

Structure of multiple-gate transistor and method for manufacturing the same

TL;DR: In this article, a structure of multiple-gate transistor and method for manufacturing the same is described, which includes a vertical semiconductor fin, gate dielectric layer, a gate electrode, and a source and drain.