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Chenming Hu

Researcher at University of California, Berkeley

Publications -  1300
Citations -  60963

Chenming Hu is an academic researcher from University of California, Berkeley. The author has contributed to research in topics: MOSFET & Gate oxide. The author has an hindex of 119, co-authored 1296 publications receiving 57264 citations. Previous affiliations of Chenming Hu include Motorola & National Chiao Tung University.

Papers
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Proceedings ArticleDOI

A scaleable model for STI mechanical stress effect on layout dependence of MOS electrical characteristics

TL;DR: This model has included the influence of STI stress not only on the mobility and saturation velocity, but also on the threshold voltage and other important second-order effects, which could simulate the layout dependence of MOS performance with good accuracy and efficiency.
Patent

Semiconductor nano-wire devices and methods of fabrication

TL;DR: Nano-wires as discussed by the authors can be formed with minimized risk of narrowing and breaking that results from silicon atom migration during an annealing process step by masking portion of the active layer where silicon atomer would otherwise agglomerate with a material such as silicon dioxide, silicon nitride, or other dielectric.
Journal ArticleDOI

Transistor characteristics with Ta/sub 2/O/sub 5/ gate dielectric

TL;DR: Ta/sub 2/O/sub 5/ gate dielectric is fabricated and characterized as a possible replacement for MOS transistors with ultra-thin gate silicon dioxide in this article.
Journal ArticleDOI

Investigation of interconnect capacitance characterization using charge-based capacitance measurement (CBCM) technique and three-dimensional simulation

TL;DR: In this article, the authors examined the recently introduced charge-based capacitance measurement (CBCM) technique through use of a three-dimensional (3-D) interconnect simulator, which can be used in conjunction with simulation at early process development stages to provide designers with accurate parasitic interconnect capacitances.